| Phase |
Objectives |
|
Nanopatterning Process
Technology |
Develop practical nanopatterning technologies to fabricate nanostructure in the range of
10 ~ 100 nm. |
Nanoprobe Application
Tecnology |
Develop nanoscale manufacturing processes to fabricate nano dots, lines,
3D nano structures /new probing process to detect electric and chemical signals
/ high-speed/processing/nanoscale assembly and manufacturing process for developing
10~100 nm level parts and equipments using scanning probe technology. |
Nanofabrication Equipment
Technology |
- Develop technologies on equipment to fabricate nanoscale devices and parts.
- Develop systems to process/assembly/measure nanoscale devices and parts. |
Nanoprocess Elementary
Technology |
Develop elementary technologies for nanoprocesses and nanofabrication equipment.
- technologies on coupled multiscale/multiphysics analysis, nanostructure design
- technologies on measurement of mechanical/electromagnetic/ optical properties, nanoscale device test and reliability evaluation |
Home > Program Contents
Research fields and contents
