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Home > Objectives |
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Final goals |
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To develop technologies on nanomanufacturing processes, nanofabrication equipment, and nanoscale analysis/ design/ control/ measurement to manufacture commercial nanoproducts smarter, cheaper, faster, and greener. |
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- Fabrication technology of 2D/ 3D shapes composed of 100~10nm level nanowires, dots and structures |
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- Fully 3D shape nanofabrication |
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- Nano-applications (Nanoelectronics, optical components, data storage, bio sensors, etc.) |
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- 30nm level nanopatterning equipment |
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- Analysis/ control/ measurement of nanostructures |
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Goals by phase |
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