Home > Objectives Final goals Development of technologies on nanoscale manufacturing processes, nanofabrication equipments, and nanoscale analysis/design/control/ measurement to manufacture commercial nanoproducts smarter, cheaper, and faster.   Objectives for each phase Phase Objectives Phase I (3 years) 02.10 ~ 05.06 Fundamental researches on nanomechatronics and infrastructure construction - 100 nm level nanopatterning technology - 20 nm level 32x32 parallel nanoprobe process technology - 100 nm level nanofabrication equipment - 100 nm level nanostructure measurement and analysis technology Phase II (3 years) 05.07 ~ 08.06 Development of nanomechatronics-applied technology - 50 nm level nanopatterning technology - 10 nm level 100x100 parallel nanoprobe process technology - 50 nm level 3D nano fabrication equipment - 50 nm level nanostructure measurement, analysis, and design technology Phase III (4 years) 08.07 ~ 12.06 Strategic item development for commercialization - 10 nm level nanopatterning technology - High productivity of probe process and application process technology - 10 nm level 3D nano fabrication equipment - 10 nm level nanostructure measurement, analysis, and design technology (DB and design S/W development)